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1

From Ultrananocrystalline Diamond to Single Crystal Diamond Growth in Hot Filament and Microwave Plasma-Enhanced CVD Reactors: a Unified Model for Growth Rates and Grain Sizes

May, Paul W., Mankelevich, Yuri A.

Journal:

The Journal of Physical Chemistry C

Année:

2008

Langue:

english

Fichier:

PDF, 374 KB

english, 2008

2

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

Rakhimova, Tatyana V., Braginsky, Oleg V., Ivanov, Vladimir V., Kovalev, Alexander S., Lopaev, Dmitry V., Mankelevich, Yuri A., Olevanov, Michael A., Proshina, Olga V., Rakhimov, Alexander T., Vasilie

Journal:

IEEE Transactions on Plasma Science

Année:

2007

Langue:

english

Fichier:

PDF, 473 KB

english, 2007

3

Boron doping: B/H/C/O gas-phase chemistry; H atom density dependences on pressure and wire temperature; puzzles regarding the gas-surface mechanism

Yuri A. Mankelevich, Michael N.R. Ashfold, Dane W. Comerford, Jie Ma, James C. Richley

Journal:

Thin Solid Films

Année:

2011

Langue:

english

Fichier:

PDF, 431 KB

english, 2011

4

On the mechanism of H atom production in hot filament activated H[sub 2] and CH[sub 4]/H[sub 2] gas mixtures

Comerford, Dane W., Smith, James A., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

The Journal of Chemical Physics

Année:

2009

Langue:

english

Fichier:

PDF, 578 KB

english, 2009

5

Number density and temperature of acetylene in hot-filament and arc-jet activated CH4/H2 gas mixtures measured using diode laser cavity ring-down absorption spectroscopy

Wills, Jonathan B., Ashfold, Michael N.R., Orr-Ewing, Andrew J., Mankelevich, Yuri A., Suetin, Nikolay V.

Journal:

Diamond and Related Materials

Année:

2003

Langue:

english

Fichier:

PDF, 298 KB

english, 2003

6

Activation and Decomposition of N 2 on Heated Tungsten Filament Surfaces

Umemoto, Hironobu, Funae, Tsuyoshi, Mankelevich, Yuri A.

Journal:

The Journal of Physical Chemistry C

Année:

2011

Langue:

english

Fichier:

PDF, 2.56 MB

english, 2011

7

Tailoring of the carbon nanowall microstructure by sharp variation of plasma radical composition

Mironovich, Kirill V., Itkis, Daniil M., Semenenko, Dmitry A., Dagesian, Sarkis A., Yashina, Lada V., Kataev, Elmar Yu., Mankelevich, Yuri A., Suetin, Nikolay V., Krivchenko, Victor A.

Journal:

Physical Chemistry Chemical Physics

Année:

2014

Langue:

english

Fichier:

PDF, 2.89 MB

english, 2014

8

Simulations of CVD Diamond Film Growth: 2D Models for the identities and concentrations of gas-phase species adsorbing on the surface

May, Paul W., Mankelevich, Yuri A.

Journal:

MRS Proceedings

Année:

2011

Langue:

english

Fichier:

PDF, 361 KB

english, 2011

9

Erratum: Molecular dissociation and vibrational excitation on a metal hot filament surface

Mankelevich, Yuri A, Ashfold, Michael N R, Umemoto, Hironobu

Journal:

Journal of Physics D Applied Physics

Année:

2014

Langue:

english

Fichier:

PDF, 39 KB

english, 2014

10

Microwave Plasma-Activated Chemical Vapour Deposition of Nitrogen-Doped Diamond, I: N 2 /H 2 and NH 3 /H 2 Plasmas

Truscott, Benjamin S., Kelly, Mark W., Potter, Katie J., Johnson, Mack, Ashfold, Michael N.R., Mankelevich, Yuri A

Journal:

Journal of Physical Chemistry A

Année:

2015

Langue:

english

Fichier:

PDF, 1.78 MB

english, 2015

11

The plasma sheath around planar probes: effects of ion collisions

Voloshin, Dmitry, Rakhimova, Tatyana, Mankelevich, Yuri

Journal:

Plasma Sources Science and Technology

Année:

2016

Langue:

english

Fichier:

PDF, 738 KB

english, 2016

12

Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO x films

Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

Journal:

Journal of Physics D Applied Physics

Année:

2016

Langue:

english

Fichier:

PDF, 2.32 MB

english, 2016

13

Modeling of Single and Dual Frequency Capacitive Discharge in Argon Hydrogen Mixture − Dynamic Effects and Ion Energy Distribution Functions

Voloshin, Dmitry G., Mankelevich, Yuri A., Proshina, Olga V., Rakhimova, Tatyana V.

Journal:

Plasma Processes and Polymers

Année:

2016

Langue:

english

Fichier:

PDF, 1.92 MB

english, 2016

14

What [plasma used for growing] diamond can shine like flame?

Ashfold, Michael N R, Mahoney, Edward J.D., Mushtaq, Sohail, Truscott, Benjamin S, Mankelevich, Yuri

Journal:

Chemical Communications

Année:

2017

Langue:

english

Fichier:

PDF, 2.28 MB

english, 2017

15

Etching low- k films by F atoms: Inside view

Palov, Alexander P., Rakhimova, Tatyana V., Voronina, Ekaterina N., Mankelevich, Yuri A.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2018

Langue:

english

Fichier:

PDF, 1.96 MB

english, 2018

16

Analysis of flows by deposition of diamond-like structures

Rebrov, Alexey, Plotnikov, Mikhail, Mankelevich, Yuri, Yudin, Ivan

Journal:

Physics of Fluids

Année:

2018

Langue:

english

Fichier:

PDF, 6.09 MB

english, 2018

17

Environmentally friendly method of silicon recycling: synthesis of silica nanoparticles in an aqueous solution

Bondareva, Julia V., Aslyamov, Timur F., Kvashnin, Alexander G., Dyakonov, Pavel V., Kuzminova, Yulia O, Mankelevich, Yuri A., Voronina, Ekaterina N., Dagesyan, Sarkis A., Egorov, Alexander V, Khmelni

Journal:

ACS Sustainable Chemistry & Engineering

Année:

2020

Fichier:

PDF, 3.14 MB

2020

18

ChemInform Abstract: Unravelling Aspects of the Gas Phase Chemistry Involved in Diamond Chemical Vapor Deposition

Michael N. R. Ashfold, Paul W. May, James R. Petherbridge, Keith N. Rosser, James A. Smith, Yuri A. Mankelevich, Nikolay V. Suetin

Journal:

Année:

2001

Fichier:

PDF, 26 KB

2001

19

Filament seasoning and its effect on the chemistry prevailing in hot filament activated gas mixtures used in diamond chemical vapour deposition

Dane W. Comerford, Ulrika F.S. D'Haenens-Johansson, James A. Smith, Michael N.R. Ashfold, Yuri A. Mankelevich

Journal:

Thin Solid Films

Année:

2008

Langue:

english

Fichier:

PDF, 286 KB

english, 2008

20

Combined experimental and modeling studies of microwave activated CH4/H2/Ar plasmas for microcrystalline, nanocrystalline, and ultrananocrystalline diamond deposition

Richley, James C., Fox, Oliver J. L., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Applied Physics

Année:

2011

Langue:

english

Fichier:

PDF, 3.36 MB

english, 2011

21

Boron-doped Homoepitaxial Diamond CVD from Microwave Plasma-Activated Ethanol/Trimethyl Borate/Hydrogen Mixtures

Belousov, Maxim E., Mankelevich, Yuri A., Minakov, Pavel V., Rakhimov, Alexander T., Suetin, Nikolay V., Khmelnitskiy, Roman A., Tal, Alexei A., Khomich, Alexander V.

Journal:

Chemical Vapor Deposition

Année:

2012

Langue:

english

Fichier:

PDF, 165 KB

english, 2012

22

Exploring the Plasma Chemistry in Microwave Chemical Vapor Deposition of Diamond from C/H/O Gas Mixtures

Kelly, Mark W., Richley, James C., Western, Colin M., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2012

Langue:

english

Fichier:

PDF, 2.68 MB

english, 2012

23

[American Institute of Aeronautics and Astronautics 35th AIAA Plasmadynamics and Lasers Conference - Portland, Oregon ()] 35th AIAA Plasmadynamics and Lasers Conference - Singlet Oxygen Generation in CW and Pulsed RF Discharges at 13.56 and 80 Mhz

Rakhimova, Tatyana, Mankelevich, Yuri, Kovalev, Alexander, Lopaev, Dmitrii, Rakhimov, Alexander, Vasilieva, Anna

Année:

2004

Langue:

english

Fichier:

PDF, 542 KB

english, 2004

24

[American Institute of Aeronautics and Astronautics 35th AIAA Plasmadynamics and Lasers Conference - Portland, Oregon ()] 35th AIAA Plasmadynamics and Lasers Conference - Effective Singlet Oxygen Generator on Traveling Microwave Discharge

Savin, Yuriy, Goryachev, Leonid, Adamenkov, Yuriy, Rakhimova, Tatyana, Mankelevich, Yuri, Popov, Nikolay

Année:

2004

Langue:

english

Fichier:

PDF, 405 KB

english, 2004

25

[American Institute of Aeronautics and Astronautics 36th AIAA Plasmadynamics and Lasers Conference - Toronto, Ontario, Canada ()] 36th AIAA Plasmadynamics and Lasers Conference - Experimental and Theoretical Study of a Pressure Scaling Possibility of VHF Singlet Oxygen Generator

Rakhimova, Tatyana, Kovalev, Aleksander, Klopovsky, Konstantin, Lopaev, Dmitrii, Mankelevich, Yuri, Vasilieva, Anna

Année:

2005

Langue:

english

Fichier:

PDF, 657 KB

english, 2005

26

[American Institute of Aeronautics and Astronautics 37th AIAA Plasmadynamics and Lasers Conference - San Francisco, California ()] 37th AIAA Plasmadynamics and Lasers Conference - Singlet Oxygen Generator Operating at High Oxygen Pressure

Rakhimova, Tatyana, Kovalev, Aleksandr, Lopaev, Dmitrii, Proshina, Olga, Mankelevich, Yuri, Vasilieva, Anna

Année:

2006

Langue:

english

Fichier:

PDF, 575 KB

english, 2006

27

Validating optical emission spectroscopy as a diagnostic of microwave activated CH[sub 4]/Ar/H[sub 2] plasmas used for diamond chemical vapor deposition

Ma, Jie, Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Applied Physics

Année:

2009

Langue:

english

Fichier:

PDF, 1.26 MB

english, 2009

28

Probing the plasma chemistry in a microwave reactor used for diamond chemical vapor deposition by cavity ring down spectroscopy

Ma, Jie, Richley, James C., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Applied Physics

Année:

2008

Langue:

english

Fichier:

PDF, 1.21 MB

english, 2008

29

Plasma-chemical processes in microwave plasma-enhanced chemical vapor deposition reactors operating with C/H/Ar gas mixtures

Mankelevich, Yuri A., Ashfold, Michael N. R., Ma, Jie

Journal:

Journal of Applied Physics

Année:

2008

Langue:

english

Fichier:

PDF, 679 KB

english, 2008

30

Simulation of Gas-Phase Kinetics in $\hbox{CHF}_{3}:\hbox{H}_{2}: \hbox{O}_{2}$ Mixtures

Voloshin, Dmitry G., Klopovskiy, Konstantin S., Mankelevich, Yuri A., Popov, Nikolay A., Rakhimova, Tatyana V., Rakhimov, Alexander T.

Journal:

IEEE Transactions on Plasma Science

Année:

2007

Langue:

english

Fichier:

PDF, 441 KB

english, 2007

31

Spectroscopic and Modeling Investigations of the Gas Phase Chemistry and Composition in Microwave Plasma Activated B 2 H 6 /CH 4 /Ar/H 2 Mixtures

Ma, Jie, Richley, James C., Davies, David R. W., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2010

Langue:

english

Fichier:

PDF, 3.76 MB

english, 2010

32

Molecular dissociation and vibrational excitation on a metal hot filament surface

Mankelevich, Yuri A, Ashfold, Michael N R, Umemoto, Hironobu

Journal:

Journal of Physics D Applied Physics

Année:

2014

Langue:

english

Fichier:

PDF, 1.18 MB

english, 2014

33

Optical Emission from Microwave Activated C/H/O Gas Mixtures for Diamond Chemical Vapor Deposition

Richley, James C., Kelly, Mark W., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2012

Langue:

english

Fichier:

PDF, 3.69 MB

english, 2012

34

Simplified Monte Carlo simulations of chemical vapour deposition diamond growth

May, Paul W, Allan, Neil L, Ashfold, Michael N R, Richley, James C, Mankelevich, Yuri A

Journal:

Journal of Physics Condensed Matter

Année:

2009

Langue:

english

Fichier:

PDF, 1.46 MB

english, 2009

35

Experimental and Modeling Studies of B Atom Number Density Distributions in Hot Filament Activated B 2 H 6 /H 2 and B 2 H 6 /CH 4 /H 2 Gas Mixtures †

Comerford, Dane W., Cheesman, Andrew, Carpenter, Thomas P. F., Davies, David M. E., Fox, Neil A., Sage, Rebecca S., Smith, James A., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2006

Langue:

english

Fichier:

PDF, 347 KB

english, 2006

36

Spectroscopic and Modeling Investigations of the Gas-Phase Chemistry and Composition in Microwave Plasma Activated B 2 H 6 /Ar/H 2 Mixtures

Ma, Jie, Richley, James C., Davies, David R. W., Cheesman, Andrew, Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2010

Langue:

english

Fichier:

PDF, 3.44 MB

english, 2010

37

Unravelling aspects of the gas phase chemistry involved in diamond chemical vapour deposition

Ashfold, Michael N. R., May, Paul W., Petherbridge, James R., Rosser, Keith N., Smith, James A., Mankelevich, Yuri A., Suetin, Nikolay V.

Journal:

Physical Chemistry Chemical Physics

Année:

2001

Langue:

english

Fichier:

PDF, 551 KB

english, 2001

38

Effects of NH[sub 3] and N[sub 2] additions to hot filament activated CH[sub 4]/H[sub 2] gas mixtures

Smith, James A., Wills, Jonathan B., Moores, Helen S., Orr-Ewing, Andrew J., Ashfold, Michael N. R., Mankelevich, Yuri A., Suetin, Nikolay V.

Journal:

Journal of Applied Physics

Année:

2002

Langue:

english

Fichier:

PDF, 492 KB

english, 2002

39

Emission properties of carbon nanowalls on porous silicon

Evlashin, Stanislav A., Mankelevich, Yuri A., Borisov, Vladimir V., Pilevskii, Andrey A., Stepanov, Anton S., Krivchenko, Victor A., Suetin, Nikolai V., Rakhimov, Alexander T.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2012

Langue:

english

Fichier:

PDF, 1.43 MB

english, 2012

40

Quantum cascade laser investigations of CH[sub 4] and C[sub 2]H[sub 2] interconversion in hydrocarbon/H[sub 2] gas mixtures during microwave plasma enhanced chemical vapor deposition of diamond

Ma, Jie, Cheesman, Andrew, Ashfold, Michael N. R., Hay, Kenneth G., Wright, Stephen, Langford, Nigel, Duxbury, Geoffrey, Mankelevich, Yuri A.

Journal:

Journal of Applied Physics

Année:

2009

Langue:

english

Fichier:

PDF, 1.85 MB

english, 2009

41

Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation

Voloshin, Dmitry, Kovalev, Alexander, Mankelevich, Yuri, Proshina, Olga, Rakhimova, Tatyana, Vasilieva, Anna

Journal:

The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics

Année:

2015

Langue:

english

Fichier:

PDF, 1.82 MB

english, 2015

42

Effects of VUV and EUV Radiation on Ultra Low-k Materials Damage

Braginsky, Oleg, Kovalev, Alexander, Lopaev, Dmitry, Mankelevich, Yury, Proshina, Olga, Rakhimova, Tatyana, Rakhimov, Alexander, Vasilieva, Anna, Zyryanov, Sergey, Baklanov, Mikhail

Journal:

MRS Proceedings

Année:

2013

Langue:

english

Fichier:

PDF, 1.25 MB

english, 2013

43

The Mechanism for Ultrananocrystalline Diamond Growth: Experimental and Theoretical Studies

May, Paul William, Mankelevich, Yuri A.

Journal:

MRS Proceedings

Année:

2006

Langue:

english

Fichier:

PDF, 125 KB

english, 2006

44

Simulations of CVD Diamond Film Growth Using a Simplified Monte Carlo Model

May, Paul William, Harvey, Jeremy N., Allan, Neil L., Richley, James C., Mankelevich, Yuri A.

Journal:

MRS Proceedings

Année:

2009

Langue:

english

Fichier:

PDF, 287 KB

english, 2009

45

SPIE Proceedings [SPIE Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures - Moscow, Russia (Monday 12 August 2002)] Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures - Spectroscopy, actinometry, and simulation of a DC discharge in CO/H2 gas mixtures

Filippov, Anatolii V., Mankelevich, Yuri A., Pal, Alexander F., Rakhimov, Alexander T., Serov, Alexander O., Suetin, Nikolay V., Ochkin, Vladimir N.

Année:

2002

Langue:

english

Fichier:

PDF, 309 KB

english, 2002

46

SPIE Proceedings [SPIE International Conference on Atomic and Molecular Pulsed Lasers IV - Tomsk, Russia (Monday 10 September 2001)] International Conference on Atomic and Molecular Pulsed Lasers IV - Quasi two-dimensional model of large-bore Cu lasers

Ivanov, V. V., Klopovsky, Konstantin, Mankelevich, Yuri A., Motovilov, Sergei A., Popov, N. A., Proshina, O. V., Rakhimova, T. V., Suetin, Nikolay V., Yudin, A. A., Yatsenko, Boris P., Tarasenko, Vict

Année:

2002

Langue:

english

Fichier:

PDF, 344 KB

english, 2002

47

SPIE Proceedings [SPIE Prague -- 2004 DL over - Prague, Czech Republic (Monday 30 August 2004)] XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - Effective singlet-oxygen production in traveling microwave discharge

Savin, Yuri V., Goryachev, L. V., Adamenkov, Yu. A., Rakhimova, T. V., Mankelevich, Yuri A., Popov, N. A., Adamenkov, Anatoly A., Egorov, Vladimir V., Ilyin, Sergey P., Kalashnik, A. M., Kolobyanin, Y

Année:

2004

Fichier:

PDF, 265 KB

2004

48

SPIE Proceedings [SPIE Prague -- 2004 DL over - Prague, Czech Republic (Monday 30 August 2004)] XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - New mechanism of O 2 (a 1 Δ g ) quenching in oxygen-contained plasmas

Braginsky, O. V., Vasilieva, A. N., Klopovsky, Konstantin S., Kovalev, A. S., Lopaev, Dmitriy V., Mankelevich, Yuri A., Popov, N. A., Rakhimova, T. V., Rakhimov, Alexander T., Savin, Yuri V.

Année:

2004

Langue:

english

Fichier:

PDF, 186 KB

english, 2004

49

SPIE Proceedings [SPIE Lasers in Synthesis, Characterization, and Processing of Diamond - Tashkent, Uzbekistan (Monday 6 October 1997)] Lasers in Synthesis, Characterization, and Processing of Diamond - Three-dimensional distributions of methyl density in a hot-filament CVD reactor: comparison with cavity ring-down spectroscopy measurements

Mankelevich, Yuri A., Suetin, Nikolay V., Konov, Vitali I., Ralchenko, Victor G.

Année:

1998

Langue:

english

Fichier:

PDF, 492 KB

english, 1998

50

Microwave Plasma-Activated Chemical Vapor Deposition of Nitrogen-Doped Diamond. II: CH 4 /N 2 /H 2 Plasmas

Truscott, Benjamin S., Kelly, Mark W., Potter, Katie J., Ashfold, Michael N. R., Mankelevich, Yuri A.

Journal:

Journal of Physical Chemistry A

Année:

2016

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2016